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Air - bridge and vertical CNT switches for high performance switching applications

Show simple item record Kaul, Anupama B. Wong, Eric W. Epp, Larry Bronikowski, Michael J. Hunt, BBrian D. 2009-02-20T19:05:34Z 2009-02-20T19:05:34Z 2006-04-17
dc.identifier.citation Materials Research Society, Spring Meeting, San Francisco, California, April 17-21, 2006. en_US
dc.identifier.clearanceno 06-1021
dc.description.abstract Carbon nanotubes are attractive for switching applications since electrostatically-actuated CNT switches have low actuation voltages and power requirements, while allowing GHz switching speeds that stem from the inherently high elastic modulus and low mass of the CNT. Our first NEM structure, the air-bridge switch, consists of suspended single-walled nanotubes (SWNTs) that lie above a sputtered Nb base electrode, where contact to the CNTs is made using evaporated Au/Ti. Electrical measurements of these air-bridge devices show well-defined ON and OFF states as a dc bias of a few volts is applied between the CNT and the Nb-base electrode. The CNT air-bridge switches were measured to have switching times down to a few nanoseconds. Our second NEM structure, the vertical CNT switch, consists of nanotubes grown perpendicular to the substrate. Vertical multi-walled nanotubes (MWNTs) are grown directly on a heavily doped Si substrate, from 200 - 300 nm wide, ~ 1 µm deep nano-pockets, with Nb metal electrodes to result in the formation of a vertical single-pole-double-throw switch architecture en_US
dc.description.sponsorship NASA/JPL en_US
dc.language.iso en_US en_US
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2006. en_US
dc.subject Carbon nanotube (CNT) switches en_US
dc.subject nanoelectromechanical systems (NEMS) devices en_US
dc.subject electrostatic switches. en_US
dc.title Air - bridge and vertical CNT switches for high performance switching applications en_US
dc.type Preprint en_US

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