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Signal processing for order 10 pm accuracy displacement metrology in real-world scientific applications

Signal processing for order 10 pm accuracy displacement metrology in real-world scientific applications

Halverson, Peter G.; Loya, Frank M.
URI: http://hdl.handle.net/2014/38266
Date: 2004-03
Keywords: metrology; interferometry; phase measurement
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004.
Citation: International Conference on Space Optics, Toulouse, France, March 30, 2004

Abstract:

This paper describes heterodyne displacement metrology gauge signal processing methods that achieve satisfactory robustness against low signal strength and spurious signals, and good long-term stability. We have a proven displacement-measuring approach that is useful not only to space-optical projects at JPL, but also to the wider field of distance measurements.

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