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A piezoelectric liquid-compatible microvalve for integrated micropropulsion

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dc.contributor.author Lee, Choonsup
dc.contributor.author Yang, Eui-Hyeok
dc.date.accessioned 2005-11-07T22:30:03Z
dc.date.available 2005-11-07T22:30:03Z
dc.date.issued 2004-06
dc.identifier.citation Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, SC, June 2004 en
dc.identifier.clearanceno 04-0746
dc.identifier.uri http://hdl.handle.net/2014/37849
dc.description.abstract A leak-tight, low-power, liquid-compatible, piezoelectric microvalve has been designed, fabricated, and fully characterized. en
dc.description.sponsorship NASA en
dc.format.extent 721083 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US en
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004. en
dc.subject MEMS en
dc.subject microvalve en
dc.subject piezoelectric en
dc.subject micropropulsion en
dc.title A piezoelectric liquid-compatible microvalve for integrated micropropulsion en
dc.type Preprint en


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