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Technology opportunity: piezoelectric MEMS microvalves

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dc.contributor.author Zeller, Martin
dc.date.accessioned 2005-10-13T17:25:08Z
dc.date.available 2005-10-13T17:25:08Z
dc.date.issued 2005
dc.identifier.clearanceno 05-2448
dc.identifier.uri http://hdl.handle.net/2014/37732
dc.description.abstract Jet Propulsion Laboratory is looking for U.S. companies to license and further develop its family of piezoelectric MEMS microvalve technologies. en
dc.description.sponsorship NASA en
dc.format.extent 52364 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US en
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2005. en
dc.subject MEMS en
dc.subject microvalves en
dc.title Technology opportunity: piezoelectric MEMS microvalves en
dc.type Preprint en


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