Tunneling Tip Protection for a Bulk Micromachined Accelerometer

Zavracky, P.M.; McClelland, B.; Wang, J.; Hartley, F.T.

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Tunneling Tip Protection for a Bulk Micromachined Accelerometer

Zavracky, P.M.; McClelland, B.; Wang, J.; Hartley, F.T.

URI: http://hdl.handle.net/2014/31189

Date: 1995

Citation: USA

Abstract:

Ultrasensitive accelerometers (on the order of 10-8 g) are needed by NASA for the measurement of orbital drag, and for seismic measurements on other planets. Silicon micromachined devices are attractive because they are light weight and smaller than conventional accelerometers. A method is presented here for fabricating a bulk micromachined accelerometer which incorporates a tunneling tip.

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