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Characterization and Modeling of Stress in Multilayer MCM-D Substrates

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dc.contributor.author Kolawa, Elizabeth en_US
dc.date.accessioned 2004-10-02T23:12:16Z
dc.date.available 2004-10-02T23:12:16Z
dc.date.issued 1995-07 en_US
dc.identifier.citation Hilton Hotel, San Francisco, California en_US
dc.identifier.clearanceno 95-0929 en_US
dc.identifier.uri http://hdl.handle.net/2014/30340
dc.description.abstract The application of fracture mechanics to analyze the crack growth and propagation in thin film- en_US
dc.format.extent 361112 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other MCM-D Substrates en_US
dc.title Characterization and Modeling of Stress in Multilayer MCM-D Substrates en_US


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