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Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures

Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures

Gutierrez, R. C.; Shcheglov, K. V.; Tang, T. K.
URI: http://hdl.handle.net/2014/19426
Date: 1998-06-07
Citation: Solid State Sensor and Actuator Workshop
Hilton Head Island, South Carolina, USA

Abstract:

We present a new microscopy tool for quantitative measurement of the resonant motion of microstructures. The new instrument uses optical interferometry to generate a three dimentional surface topographic map of a vibrating micormachined resonator in vacuum.

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