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Micro Inertial Reference System for Microspacecraft

Micro Inertial Reference System for Microspacecraft

Tang, T. K.; Gutierrez, R. C.; Stell, C. B.; Vorperian, V.; Shcheglov, K.; Miller, L. M.; Pososek, J. A.; Kaiser, W. J.
URI: http://hdl.handle.net/2014/18915
Date: 1998-03-16
Citation: Government Microcircuit Applications Conference
Arlington, Virginia, USA

Abstract:

This paper reports on the development of a silicon bulk micromachined vibratory gyroscope designed for a micro inertial reference system for microspacecraft applications.

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