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Reliability Assessment of COTS MEMS Components for Aerospace Environment

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dc.contributor.author Ramesham, R. en_US
dc.contributor.author Ghaffarian, R. en_US
dc.contributor.author Kim, N. en_US
dc.date.accessioned 2004-09-23T23:25:17Z
dc.date.available 2004-09-23T23:25:17Z
dc.date.issued 1999-09 en_US
dc.identifier.citation SPIE en_US
dc.identifier.citation Santa Clara, CA, USA en_US
dc.identifier.clearanceno 99-0521 en_US
dc.identifier.uri http://hdl.handle.net/2014/17099
dc.description.abstract Research and development of Micro-Electro-Mechanical Systems (MEMS) in the last decade has shown a significant promise for a variety of commercial applications including automobile and medical purposes. en_US
dc.format.extent 102204 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Aerospace Environment MEMS sensors COTS reliability en_US
dc.title Reliability Assessment of COTS MEMS Components for Aerospace Environment en_US


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