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A water-transfer technique for a continuous membrane MEMS deformable mirror

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dc.contributor.author Yang, E. en_US
dc.date.accessioned 2004-09-23T21:57:19Z
dc.date.available 2004-09-23T21:57:19Z
dc.date.issued 2000-11-13 en_US
dc.identifier.citation Second Annual CfAO MEMS Workshop en_US
dc.identifier.citation Berkeley, California, USA en_US
dc.identifier.clearanceno 00-2334 en_US
dc.identifier.uri http://hdl.handle.net/2014/16346
dc.format.extent 20786 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other deformable mirrors continuous membranes membrane transfer en_US
dc.title A water-transfer technique for a continuous membrane MEMS deformable mirror en_US


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