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A new wafer-level membrane transfer technique for MEMS deformable mirrors

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dc.contributor.author Yang, E. H. en_US
dc.contributor.author Wiberg, D. V. en_US
dc.date.accessioned 2004-09-23T21:19:08Z
dc.date.available 2004-09-23T21:19:08Z
dc.date.issued 2001-01-21 en_US
dc.identifier.citation 14th IEEE International Micro Electro Mechanical Systems Conference en_US
dc.identifier.citation USA en_US
dc.identifier.clearanceno 00-1797 en_US
dc.identifier.uri http://hdl.handle.net/2014/15972
dc.format.extent 811334 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other membrane transfer wafer-level transfer indium-bonding hermetic sealing deformable mirror single crystal silicon en_US
dc.title A new wafer-level membrane transfer technique for MEMS deformable mirrors en_US


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