Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases

Vargo, S. E.; Green, A. A.; Muntz, E. P.

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Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases

Vargo, S. E.; Green, A. A.; Muntz, E. P.

URI: http://hdl.handle.net/2014/15743

Date: 2000-11-05

Citation: Fundamentals of Heat Transfer in Microdevices and Microsystems
Orlando, FL, USA

Abstract:

The success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS).

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Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases

Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases

Abstract:

Items in TRS are protected by copyright, but are furnished with U.S. government purpose use rights.

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