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Thinned Charge Coupled Devices with Flat Focal Planes for UV Imaging

Thinned Charge Coupled Devices with Flat Focal Planes for UV Imaging

Jones, T.; Deelman, P.; Elliott, S.; Grunthaner, P.; Nikzad, S.; Wilson, R.
URI: http://hdl.handle.net/2014/14174
Date: 2000
Citation: Sensors, Cameras, and Systems for Scientific/Industrial Applications
USA

Abstract:

A versatile post-fabrication process to produce thinned, flat, back-illuminated CCDs is being developed at Jet Propulsion Laboratory's Microdevices Laboratory.

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