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A wafer transfer technology for MEMS adaptive optics

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dc.contributor.author Yang, E. H. en_US
dc.contributor.author Wiberg, D. V. en_US
dc.date.accessioned 2004-09-22T22:49:23Z
dc.date.available 2004-09-22T22:49:23Z
dc.date.issued 2001-11-16 en_US
dc.identifier.citation ASME MEMS Symposia/2001 International Mechanical Engineering Congress and Exposition en_US
dc.identifier.citation New York, USA en_US
dc.identifier.clearanceno 01-0949 en_US
dc.identifier.uri http://hdl.handle.net/2014/12656
dc.format.extent 491861 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other wafer transfer micro-electromechanical systems adaptive optics en_US
dc.title A wafer transfer technology for MEMS adaptive optics en_US


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