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Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01
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| dc.contributor.author | Lawton, R. | en_US |
| dc.contributor.author | Lin, G. | en_US |
| dc.contributor.author | Wellman, J. | en_US |
| dc.date.accessioned | 2004-09-22T22:21:53Z | |
| dc.date.available | 2004-09-22T22:21:53Z | |
| dc.date.issued | 2000-08-04 | en_US |
| dc.identifier.clearanceno | 01-0069 | en_US |
| dc.identifier.uri | http://hdl.handle.net/2014/12169 | |
| dc.format.extent | 94162 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en_US | |
| dc.subject.other | MEMS reliability analysis | en_US |
| dc.title | Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01 | en_US |
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JPL TRS 1992+
JPL TRS 1992+