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Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01

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dc.contributor.author Lawton, R. en_US
dc.contributor.author Lin, G. en_US
dc.contributor.author Wellman, J. en_US
dc.date.accessioned 2004-09-22T22:21:53Z
dc.date.available 2004-09-22T22:21:53Z
dc.date.issued 2000-08-04 en_US
dc.identifier.clearanceno 01-0069 en_US
dc.identifier.uri http://hdl.handle.net/2014/12169
dc.format.extent 94162 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other MEMS reliability analysis en_US
dc.title Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01 en_US


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