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MSTAR: a sub-micron absolute metrology system
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MSTAR: a sub-micron absolute metrology system
Lay, O.
;
Dubovitsky, S.
;
Peters, R.
;
Burger, J.
;
Ahn, S. W.
;
Steier, W.
;
Fetterman, H.
URI:
http://hdl.handle.net/2014/11264
Date:
2002
Citation:
Optics Letters
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JPL TRS 1992+
JPL TRS 1992+
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