JPL Technical Report Server

Browsing by Subject "nanolithography"

Browsing by Subject "nanolithography"

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  • Strekalov, Dmitry; Dowling, Jonathan (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2001., 2001-01-07)
    We discuss advantages of using non-classical states of light for two aspects of optical imaging: creating of miniature images on photosensitive substrates, which constitutes the foundation for optical lithography, and ...