JPL Technical Report Server
Electron-beam fabrication of analog-relief diffractive optics of non-flat substrates at Jet Propulsion Laboratory
Login
JPL TRS Home
→
JPL Technical Report Server
→
JPL TRS 1992+
→
View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Electron-beam fabrication of analog-relief diffractive optics of non-flat substrates at Jet Propulsion Laboratory
Wilson, D.
;
Maker, P.
;
Muller, R.
URI:
http://hdl.handle.net/2014/8088
Date:
2002-01-14
Citation:
NNUN Workshop: Electron Beam Lithography for Nanostructure Fabrication
Ithaca, NY, USA
Show full item record
Items in TRS are protected by copyright, but are furnished with U.S. government purpose use rights.
Files in this item
Name:
02-0051.pdf
Size:
5.694Mb
Format:
PDF
View/
Open
This item appears in the following Collection(s)
JPL TRS 1992+
JPL TRS 1992+
Search
Search
This Collection
Browse
All Content
Communities & Collections
By Issue Date
Authors
Titles
Subjects
This Collection
By Issue Date
Authors
Titles
Subjects
My Account
Login
Register