Electron-beam fabrication of analog-relief diffractive optics of non-flat substrates at Jet Propulsion Laboratory

Wilson, D.; Maker, P.; Muller, R.

URI: http://hdl.handle.net/2014/8088

Date: 2002-01-14

Citation: NNUN Workshop: Electron Beam Lithography for Nanostructure Fabrication
Ithaca, NY, USA

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JPL TRS 1992+
JPL TRS 1992+

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