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Development of ultra-high sensitivity nano-mechanical resonators for RF mechanical filter applications

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dc.contributor.author Son, K. en_US
dc.contributor.author George, T. en_US
dc.contributor.author Fathauer, R. W. en_US
dc.contributor.author Houston, B. en_US
dc.date.accessioned 2004-09-16T23:17:51Z
dc.date.available 2004-09-16T23:17:51Z
dc.date.issued 2003-12-01 en_US
dc.identifier.citation 2003 Materials Research Society Meeting en_US
dc.identifier.citation Boston, MA, USA en_US
dc.identifier.clearanceno 03-1637 en_US
dc.identifier.uri http://hdl.handle.net/2014/7614
dc.format.extent 2221688 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other MEMS nano mechanical resonator en_US
dc.title Development of ultra-high sensitivity nano-mechanical resonators for RF mechanical filter applications en_US


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