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Development of ultra-high sensitivity nano-mechanical resonators for RF mechanical filter applications
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| dc.contributor.author | Son, K. | en_US |
| dc.contributor.author | George, T. | en_US |
| dc.contributor.author | Fathauer, R. W. | en_US |
| dc.contributor.author | Houston, B. | en_US |
| dc.date.accessioned | 2004-09-16T23:17:51Z | |
| dc.date.available | 2004-09-16T23:17:51Z | |
| dc.date.issued | 2003-12-01 | en_US |
| dc.identifier.citation | 2003 Materials Research Society Meeting | en_US |
| dc.identifier.citation | Boston, MA, USA | en_US |
| dc.identifier.clearanceno | 03-1637 | en_US |
| dc.identifier.uri | http://hdl.handle.net/2014/7614 | |
| dc.format.extent | 2221688 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en_US | |
| dc.subject.other | MEMS nano mechanical resonator | en_US |
| dc.title | Development of ultra-high sensitivity nano-mechanical resonators for RF mechanical filter applications | en_US |
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JPL TRS 1992+
JPL TRS 1992+