Development of ultra-high sensitivity nano-mechanical resonators for RF mechanical filter applications

dc.contributor.author	Son, K.	en_US
dc.contributor.author	George, T.	en_US
dc.contributor.author	Fathauer, R. W.	en_US
dc.contributor.author	Houston, B.	en_US
dc.date.accessioned	2004-09-16T23:17:51Z
dc.date.available	2004-09-16T23:17:51Z
dc.date.issued	2003-12-01	en_US
dc.identifier.citation	2003 Materials Research Society Meeting	en_US
dc.identifier.citation	Boston, MA, USA	en_US
dc.identifier.clearanceno	03-1637	en_US
dc.identifier.uri	http://hdl.handle.net/2014/7614
dc.format.extent	2221688 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	MEMS nano mechanical resonator	en_US
dc.title	Development of ultra-high sensitivity nano-mechanical resonators for RF mechanical filter applications	en_US