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Low-stress high performance soft magnetic materials for MEMS from additive-free chloride baths

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dc.contributor.author Myung, N. V. en_US
dc.contributor.author Urgiles, E. en_US
dc.contributor.author Son, K. en_US
dc.contributor.author Lee, C. en_US
dc.contributor.author George, T. en_US
dc.date.accessioned 2004-09-16T23:16:05Z
dc.date.available 2004-09-16T23:16:05Z
dc.date.issued 2003-10-12 en_US
dc.identifier.citation 204th Electrochemical Society 2003 Fall Meeting en_US
dc.identifier.citation Orlando, FL, USA en_US
dc.identifier.clearanceno 03-1537 en_US
dc.identifier.uri http://hdl.handle.net/2014/7580
dc.format.extent 2563109 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other magnetic MEMS en_US
dc.title Low-stress high performance soft magnetic materials for MEMS from additive-free chloride baths en_US


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