JPL Technical Report Server

Materials and geometry optimization for the development of ultra-high sensitive nano-mechanical resonators

Show simple item record

dc.contributor.author Son, K. en_US
dc.contributor.author Fathauer, R. en_US
dc.contributor.author George, T. en_US
dc.contributor.author Houston, B. en_US
dc.date.accessioned 2004-09-16T23:10:02Z
dc.date.available 2004-09-16T23:10:02Z
dc.date.issued 2003-04-21 en_US
dc.identifier.citation 2003 MRS Spring Meeting en_US
dc.identifier.citation San Francisco, CA, USA en_US
dc.identifier.clearanceno 03-1319 en_US
dc.identifier.uri http://hdl.handle.net/2014/7447
dc.format.extent 880344 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other nano MEMS en_US
dc.title Materials and geometry optimization for the development of ultra-high sensitive nano-mechanical resonators en_US


Files in this item

This item appears in the following Collection(s)

Show simple item record

Search


Browse

My Account