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Micro electro mechanical systems (MEMS) actuator technologies for future spacecrafts

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dc.contributor.author Yang, E. H. en_US
dc.date.accessioned 2004-09-16T21:30:01Z
dc.date.available 2004-09-16T21:30:01Z
dc.date.issued 2003-03-01 en_US
dc.identifier.citation 13th Annual KSEA South-Western Regional Technology Conference en_US
dc.identifier.citation Cerritos, CA, USA en_US
dc.identifier.clearanceno 03-0492 en_US
dc.identifier.uri http://hdl.handle.net/2014/6643
dc.format.extent 5164064 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other MEMS microvalve adaptive optics en_US
dc.title Micro electro mechanical systems (MEMS) actuator technologies for future spacecrafts en_US


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