Kaul, A. B.; Megerian, K. G.; Baron, R. L.; Jennings, A. T.; Jang, D.; Greer, J. R.
(Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2011., 2009-04-16)
We have developed manufacturable approaches to form single, vertically aligned carbon nanotubes, where the tubes are centered precisely, and placed within a few hundred nm of 1-1.5 m deep trenches. These wafer-scale ...