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The DUV stability of superlattices-doped CMOS detector arrays.

The DUV stability of superlattices-doped CMOS detector arrays.

Hoenk, M. E.; Carver, A.; Jones, T.; Dickie, M.; Cheng, P.; Greer, F.; Nikzad, S.; Sgro, J.; Tsur, S.
URI: http://hdl.handle.net/2014/44077
Date: 2013-06-12
Keywords: superlattices doping; molecular beam epitaxy; imaging dectors; ultraviolet; Complementary metal–oxide–semiconductor (CMOS); molecular-beam epitaxy (MBE)
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2013
Citation: International Image Sensors Workshop (IISW), Snowbird, Utah, June 12-16, 2013.

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