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Carbon-based nano-electro-mechanical-systems

Show simple item record Kaul, A. B. Khan, A. R. Megerian, K. G. Epp, L. LeDuc, G. Bagge, L. Jennings, A. T. Jang, D. Greer, J. R. 2013-09-09T15:14:50Z 2013-09-09T15:14:50Z 2010-04-05
dc.identifier.citation SPIE DSS, Micro-and Nanotechnologies for Defense, Space and Securites, Orlando, Florida, April 5 , 2011 en_US
dc.identifier.clearanceno 11-4130
dc.description.abstract We provide an overview of our work where carbon-based nanostructures have been applied to two-dimensional (2D) planar and three-dimensional (3D) vertically-oriented nano-electro-mechanical (NEM) switches. In the first configuration, laterally oriented single-walled nanotubes (SWNTs) synthesized using thermal chemical vapor deposition (CVD) were implemented for forming bridge-type 2D NEMS switches, where switching voltages were on the order of a few volts. In the second configuration, vertically oriented carbon nanofibers (CNFs) synthesized using plasma-enhanced (PE) CVD have been explored for their potential application in 3D NEMS. We have performed nanomechanical measurements on such vertically oriented tubes using nanoindentation to determine the mechanical properties of the CNFs. Electrostatic switching was demonstrated in the CNFs synthesized on refractory metallic nitride substrates, where a nanoprobe was used as the actuating electrode inside a scanning-electron-microscope. The switching voltages were determined to be in the tens of volts range and van der Waals interactions at these length scales appeared significant, suggesting such structures are promising for nonvolatile memory applications. A finite element model was also developed to determine a theoretical pull-in voltage which was compared to experimental results en_US
dc.description.sponsorship NASA/JPL en_US
dc.language.iso en_US en_US
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2011. en_US
dc.subject single-walled nanotubes (SWNTs) en_US
dc.subject Complementary-Metal-Oxide-Semiconductor (CMOS) en_US
dc.title Carbon-based nano-electro-mechanical-systems en_US
dc.type Preprint en_US

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