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Development of cryogenic detector arrays using ALD

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dc.contributor.author LeDuc, Rick
dc.contributor.author Greer, Frank
dc.contributor.author Day, Peter
dc.date.accessioned 2013-03-29T20:39:25Z
dc.date.available 2013-03-29T20:39:25Z
dc.date.issued 2012-12-11
dc.identifier.citation NASA Long-Wavelength SR&T Workshop, Washington, D. C. , December 11, 2012 en_US
dc.identifier.clearanceno 12-5868
dc.identifier.uri http://hdl.handle.net/2014/42933
dc.description.sponsorship NASA/JPL en_US
dc.language.iso en_US en_US
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012. en_US
dc.subject detectir en_US
dc.subject arrays en_US
dc.subject superconductors en_US
dc.subject Atomic Layer Deposition en_US
dc.title Development of cryogenic detector arrays using ALD en_US
dc.type Plan or blueprint en_US


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