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Development of cryogenic detector arrays using ALD

Show simple item record LeDuc, Rick Greer, Frank Day, Peter 2013-03-29T20:39:25Z 2013-03-29T20:39:25Z 2012-12-11
dc.identifier.citation NASA Long-Wavelength SR&T Workshop, Washington, D. C. , December 11, 2012 en_US
dc.identifier.clearanceno 12-5868
dc.description.sponsorship NASA/JPL en_US
dc.language.iso en_US en_US
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012. en_US
dc.subject detectir en_US
dc.subject arrays en_US
dc.subject superconductors en_US
dc.subject Atomic Layer Deposition en_US
dc.title Development of cryogenic detector arrays using ALD en_US
dc.type Plan or blueprint en_US

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