Development of cryogenic detector arrays using ALD

LeDuc, Rick; Greer, Frank; Day, Peter

dc.contributor.author	LeDuc, Rick
dc.contributor.author	Greer, Frank
dc.contributor.author	Day, Peter
dc.date.accessioned	2013-03-29T20:39:25Z
dc.date.available	2013-03-29T20:39:25Z
dc.date.issued	2012-12-11
dc.identifier.citation	NASA Long-Wavelength SR&T Workshop, Washington, D. C. , December 11, 2012	en_US
dc.identifier.clearanceno	12-5868
dc.identifier.uri	http://hdl.handle.net/2014/42933
dc.description.sponsorship	NASA/JPL	en_US
dc.language.iso	en_US	en_US
dc.publisher	Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.	en_US
dc.subject	detectir	en_US
dc.subject	arrays	en_US
dc.subject	superconductors	en_US
dc.subject	Atomic Layer Deposition	en_US
dc.title	Development of cryogenic detector arrays using ALD	en_US
dc.type	Plan or blueprint	en_US