Persistent Identifier
|
hdl:2014/42317 |
Publication Date
|
2012-08-13 |
Title
| Inductively coupled plasma etching for delineation of InAs/GaSb pixels |
Author
| Nguyen, Jean (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Gill, John (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Rafol, Sir B. (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Soibel, Alexander (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Khoskhlagh, Arezou (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Ting, David (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Keo, Sam (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Fisher, Anita (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Luong, Edward (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Liu, John (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Mumolo, Jason (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.)
Gunapala, Sarath D. (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012.) |
Point of Contact
|
Use email button above to contact.
Nguyen, Jean |
Description
| We developed 320x256 Complimentary Barrier Infrared (CBIRD) focal plane array (FPA) for long wave infrared (LWIR) imaging application. The FPA layers grown by molecular beam epitaxy (MBE) had 300 periods 1.9 µm thick absorber. The CBIRD arrays showed the mean dark current density of 2.2 x 10‐4 A/cm2, when 128 mV bias voltage was applied. The long wave cut off was observed at 8.8 μm at the 50 % peak and the maximum quantum efficiency was 54 % at 5.6 µm. The arrays had 81 % fill factor with 97 % operability with noise equivalent difference temperature (NEΔT) of 18.6 mK and a mean detectivity of D*=1.3 x 1011 Hz1/2/W. |
Subject
| Other |
Production Date
| 2012-08-13 |