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320 x 256 complementary barrier infrared detector focal plane array for long-wave infrared imaging

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dc.contributor.author Nguyen, Jean
dc.contributor.author Rafol, Sir B.
dc.contributor.author Soibel, Alexander
dc.contributor.author Khoskhlagh, Arezou
dc.contributor.author Ting, David Z.-Y.
dc.contributor.author Liu, John K.
dc.contributor.author Mumolo, Jason M.
dc.contributor.author Gunapala, Sarath D.
dc.date.accessioned 2012-10-03T22:20:56Z
dc.date.available 2012-10-03T22:20:56Z
dc.date.issued 2012-04-23
dc.identifier.citation SPIE Defense and Security Symposium, Baltimore, Maryland, April 23-27, 2012 en_US
dc.identifier.clearanceno 12-1629
dc.identifier.uri http://hdl.handle.net/2014/42315
dc.description.abstract A 320 x 256 Complementary Barrier Infrared (CBIRD) focal plane array for long-wavelength infrared (LWIR) imaging is reported. The arrays were grown by molecular beam expitaxy (MBE) with a 300 period 1.9 um thick absorber. The mean dark current density of 2.2 x 10-4 A/cm2 was measured at an operating bias of 128 mV with a long wavelength cutoff of 8.8 μm observed at 50% of the peak. The maximum quantum efficiency was 54% measured at 5.6 μm. Operating at T = 80K, the array yielded an 81% fill factor with 97% operability. Good imagery with a mean noise equivalent different temperature (NET) of 18.6 mK and a mean detectivity of D* = 1.3 x 1011 cm-Hz1/2/W was achieved. The substrate was thinned using mechanical lapping and neither an AR coating nor a passivation layer was applied. This article provides the details of the fabrication process for achieving low-dark current LWIR CBIRD arrays. Discussion for an effective hard mask for excellent pattern transfer is given and appropriate mounting techniques for good thermal contact during the dry etching process is described. The challenges and differences between etching large 200 μm test diodes and small 28 μm FPA pixels are given. en_US
dc.description.sponsorship NASA/JPL en_US
dc.language.iso en_US en_US
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012. en_US
dc.subject Inductively Coupled Plasma Dry Etching en_US
dc.subject Superlattice Detectors en_US
dc.subject Long-wavelength Infrared en_US
dc.subject Focal Plane Arrays (FPA) en_US
dc.subject InAs/GaSb en_US
dc.title 320 x 256 complementary barrier infrared detector focal plane array for long-wave infrared imaging en_US
dc.type Preprint en_US
dc.subject.NASATaxonomy Instrumentation and Photography en_US


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