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Curvature control of silicon microlens for THz dielectric antenna

Show simple item record Lee, Choonsup Chattopadhyay, Goutam Cooper, Ken Mehdi, Imran 2012-10-03T21:35:16Z 2012-10-03T21:35:16Z 2012-09-23
dc.identifier.citation 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz). Wollongong, Australia, September 23-28 , 2012 en_US
dc.identifier.clearanceno 12-3157
dc.description.abstract We have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses. en_US
dc.description.sponsorship NASA/JPL en_US
dc.language.iso en_US en_US
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2012. en_US
dc.subject silicon microlens en_US
dc.subject silicon antenna technology en_US
dc.title Curvature control of silicon microlens for THz dielectric antenna en_US
dc.type Preprint en_US
dc.subject.NASATaxonomy Instrumentation and Photography en_US

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