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Atomically precise surface and interface engineering via atomic layer deposition to enable high‐performance materials, detectors, and instruments

Atomically precise surface and interface engineering via atomic layer deposition to enable high‐performance materials, detectors, and instruments

F. Greer; Hoenk, M. E.; Jones, T.J.; Jacquot, B. C.; Dickie, M.; Monacos, S.; Nikzad, S.; Day, P.; Leduc, R.; Hamden, E.; Schiminovich, D.; Beasley, M.; Gantner, B.; Morrissey, Patrick; Martin, Christopher
URI: http://hdl.handle.net/2014/42278
Date: 2011
Keywords: Anti‐reflective coatings; Optical elements (filters); Superconducting detectors; Surface treatments
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2011.

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