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Tuning of MEMS devices using evolutionary computation and open-loop frequency response

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dc.contributor.author Keymeulen, Didier
dc.contributor.author Fink, Wolfgang
dc.contributor.author Ferguson, Michael I.
dc.contributor.author Peay, Chris
dc.contributor.author Oks, Boris
dc.contributor.author Terrile, Richard
dc.contributor.author Yee, Karl
dc.date.accessioned 2009-01-21T17:18:35Z
dc.date.available 2009-01-21T17:18:35Z
dc.date.issued 2005-03-15
dc.identifier.citation 2005 IEEE Aerospace Conference, Big Sky, Montana, March 5-12, 2005. en_US
dc.identifier.clearanceno 04-3966
dc.identifier.uri http://hdl.handle.net/2014/41053
dc.description.abstract We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation. en_US
dc.description.sponsorship NASA/JPL en_US
dc.language.iso en_US en_US
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2005. en_US
dc.subject evolvable hardware en_US
dc.subject microelectromechanical systems (MEMS) gyroscope en_US
dc.subject evolutionary computation en_US
dc.title Tuning of MEMS devices using evolutionary computation and open-loop frequency response en_US
dc.type Preprint en_US


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