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Total dose degradation of MEMS optical mirrors

Total dose degradation of MEMS optical mirrors

Miyahira, T. F.; Becker, H. N.; McClure, S. S.; Edmonds, L. D.; Johnston, A. H.
URI: http://hdl.handle.net/2014/38661
Date: 2003-07
Keywords: MEMS; accelerometers
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2003.
Citation: 2003 IEEE Nuclear and Space Radiation Effects Conference, Monterey, CA, July 21, 2003

Abstract:

This paper discusses the effect of ionizing radiation on two types of deformable MEMS mirrors.

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