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Total dose degradation of MEMS optical mirrors
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Total dose degradation of MEMS optical mirrors
Miyahira, T. F.
;
Becker, H. N.
;
McClure, S. S.
;
Edmonds, L. D.
;
Johnston, A. H.
URI:
http://hdl.handle.net/2014/38661
Date:
2003-07
Keywords:
MEMS; accelerometers
Publisher:
Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2003.
Citation:
2003 IEEE Nuclear and Space Radiation Effects Conference, Monterey, CA, July 21, 2003
Abstract:
This paper discusses the effect of ionizing radiation on two types of deformable MEMS mirrors.
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JPL TRS 1992+
JPL TRS 1992+
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