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Optimized design, fabrication and charactrization of PZT unimorph microactuators for deformable mirrors
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Optimized design, fabrication and charactrization of PZT unimorph microactuators for deformable mirrors
Hishinuma, Yoshikazu
;
Yang, Eui-Hyeok
;
Cheng, Jian-Gong
;
Trolier-McKinstry, Susan
URI:
http://hdl.handle.net/2014/38591
Date:
2004-11
Keywords:
MEMS; actuator; piezoelectric; deformable mirror
Publisher:
Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004.
Citation:
ASME International Mechanical Engineering Congress and RD&D Expo
Abstract:
This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs).
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JPL TRS 1992+
JPL TRS 1992+
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