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Optimized design, fabrication and charactrization of PZT unimorph microactuators for deformable mirrors

Optimized design, fabrication and charactrization of PZT unimorph microactuators for deformable mirrors

Hishinuma, Yoshikazu; Yang, Eui-Hyeok; Cheng, Jian-Gong; Trolier-McKinstry, Susan
URI: http://hdl.handle.net/2014/38591
Date: 2004-11
Keywords: MEMS; actuator; piezoelectric; deformable mirror
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004.
Citation: ASME International Mechanical Engineering Congress and RD&D Expo

Abstract:

This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs).

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