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Signal processing for order 10 PM accuracy displacement metrology gauges in real-world scientific applications

Signal processing for order 10 PM accuracy displacement metrology gauges in real-world scientific applications

Halverson, Peter C.; Loya, Frank M.
URI: http://hdl.handle.net/2014/38383
Date: 2004-03-30
Keywords: metrology; interferometry; phase measurement
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004
Citation: International Conference on Space Optics, Toulouse, France, March 30, 2004.

Abstract:

The Space Interferometry Mission (SIM), Terrestrial Planet Finder (TPF) and James Web Space Telescope (JWST) need stable, reliable distance metrology with subnanometer accuracy.

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