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Single-crystal silicon continuous membrane deformable mirror with PZT unimorph microactuator arrays

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dc.contributor.author Hishinuma, Yoshikazu
dc.contributor.author Yang, Eui-Hyeok
dc.date.accessioned 2005-11-10T17:07:09Z
dc.date.available 2005-11-10T17:07:09Z
dc.date.issued 2004-06
dc.identifier.citation A Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, SC, June 2004 en
dc.identifier.clearanceno 04-0736
dc.identifier.uri http://hdl.handle.net/2014/37961
dc.description.abstract For the first time, this paper reports on the piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon deformable membrane. en
dc.description.sponsorship NASA en
dc.format.extent 690745 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US en
dc.publisher Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004 en
dc.subject MEMS en
dc.subject actuator en
dc.subject piezoelectric en
dc.subject deformable mirror en
dc.title Single-crystal silicon continuous membrane deformable mirror with PZT unimorph microactuator arrays en
dc.type Preprint en


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