Single-crystal silicon continuous membrane deformable mirror with PZT unimorph microactuator arrays

Hishinuma, Yoshikazu; Yang, Eui-Hyeok

dc.contributor.author	Hishinuma, Yoshikazu
dc.contributor.author	Yang, Eui-Hyeok
dc.date.accessioned	2005-11-10T17:07:09Z
dc.date.available	2005-11-10T17:07:09Z
dc.date.issued	2004-06
dc.identifier.citation	A Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, SC, June 2004	en
dc.identifier.clearanceno	04-0736
dc.identifier.uri	http://hdl.handle.net/2014/37961
dc.description.abstract	For the first time, this paper reports on the piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon deformable membrane.	en
dc.description.sponsorship	NASA	en
dc.format.extent	690745 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US	en
dc.publisher	Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004	en
dc.subject	MEMS	en
dc.subject	actuator	en
dc.subject	piezoelectric	en
dc.subject	deformable mirror	en
dc.title	Single-crystal silicon continuous membrane deformable mirror with PZT unimorph microactuator arrays	en
dc.type	Preprint	en