Publisher:Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004
Citation:A Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, SC, June 2004
Abstract:
For the first time, this paper reports on the piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon deformable membrane.