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Single-crystal silicon continuous membrane deformable mirror with PZT unimorph microactuator arrays

Single-crystal silicon continuous membrane deformable mirror with PZT unimorph microactuator arrays

Hishinuma, Yoshikazu; Yang, Eui-Hyeok
URI: http://hdl.handle.net/2014/37961
Date: 2004-06
Keywords: MEMS; actuator; piezoelectric; deformable mirror
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004
Citation: A Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, SC, June 2004

Abstract:

For the first time, this paper reports on the piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon deformable membrane.

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