JPL Technical Report Server

A piezoelectric liquid-compatible microvalve for integrated micropropulsion

A piezoelectric liquid-compatible microvalve for integrated micropropulsion

Lee, Choonsup; Yang, Eui-Hyeok
URI: http://hdl.handle.net/2014/37849
Date: 2004-06
Keywords: MEMS; microvalve; piezoelectric; micropropulsion
Publisher: Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2004.
Citation: Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, SC, June 2004

Abstract:

A leak-tight, low-power, liquid-compatible, piezoelectric microvalve has been designed, fabricated, and fully characterized.

Show full item record

Items in TRS are protected by copyright, but are furnished with U.S. government purpose use rights.

Files in this item

Thumbnail
Name: 04-0746.pdf
Size: 704.1Kb
Format: PDF
View/Open

This item appears in the following Collection(s)

Search


Browse

My Account