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Measurement and Modeling of Size and Proximity Effects in Conductor Linewidths

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dc.contributor.author Lieneweg, U. en_US
dc.contributor.author Zamani, N. en_US
dc.date.accessioned 2004-10-06T04:19:23Z
dc.date.available 2004-10-06T04:19:23Z
dc.date.issued 1994-03 en_US
dc.identifier.citation San Diego, California, USA en_US
dc.identifier.clearanceno 93-1388 en_US
dc.identifier.uri http://hdl.handle.net/2014/35666
dc.description.abstract The widths of refractory-gate metal lines were measured as a function of design width W<sub>i</sub> and design spacing S<sub>j</sub> using an electrical test structure, the Cross-Quad-Bridge. en_US
dc.format.extent 142245 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other refractory-gate metal lines Cross-Quad-Bridge Resistors linewidth aberration en_US
dc.title Measurement and Modeling of Size and Proximity Effects in Conductor Linewidths en_US


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