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Control of Micromachined Deformable Mirrors

Show simple item record Agronin, M. L. en_US Bartman, R. en_US Hadaegh, F. Y. en_US Kaiser, W. en_US Wang, P. K. C. en_US 2004-10-06T03:44:56Z 2004-10-06T03:44:56Z 1992-05 en_US
dc.identifier.citation Pasadena, CA en_US
dc.identifier.clearanceno 93-1070
dc.description.abstract A micromachined deformable mirror with pixelated electrostatic actuators is proposed. The paper begins with a physical description of the proposed mirror. Then, a mathematical model in the form of a nonlinear partial differential equation describing the mirror surface deformations is derived. This model is used to derive the required voltages for the actuators to achieve a specified static deformation of the mirror surface. This is followed by the derivation of a static nonlinear feedback controller for achieving noninteracting actuation. Then, the structure for a complete control system for wavefront correction is proposed. The paper concludes with a discussion of the physical implementation of the proposed control system. en_US
dc.format.extent 598097 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other mirrors micromachining electrostatic actuators adaptive optics silicon en_US
dc.title Control of Micromachined Deformable Mirrors en_US

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