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Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics Applications
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| dc.contributor.author | Miller, L. | en_US |
| dc.contributor.author | Kaiser, W. | en_US |
| dc.contributor.author | Kenny, T. | en_US |
| dc.date.accessioned | 2004-10-06T02:10:21Z | |
| dc.date.available | 2004-10-06T02:10:21Z | |
| dc.date.issued | 1993-04-12 | en_US |
| dc.identifier.citation | Orlando, Florida, USA | en_US |
| dc.identifier.clearanceno | 93-0725 | en_US |
| dc.identifier.uri | http://hdl.handle.net/2014/35158 | |
| dc.description.abstract | This paper describes how a micromachined, electrostatically controlled, and capacitively sensed deformable membrane mirror would meet the needs for active and adaptive optical elements. | en_US |
| dc.format.extent | 383326 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en_US | |
| dc.subject.other | micromachined deformable mirror adaptive optics | en_US |
| dc.title | Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics Applications | en_US |
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JPL TRS 1992+
JPL TRS 1992+