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Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics Applications

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dc.contributor.author Miller, L. en_US
dc.contributor.author Kaiser, W. en_US
dc.contributor.author Kenny, T. en_US
dc.date.accessioned 2004-10-06T02:10:21Z
dc.date.available 2004-10-06T02:10:21Z
dc.date.issued 1993-04-12 en_US
dc.identifier.citation Orlando, Florida, USA en_US
dc.identifier.clearanceno 93-0725 en_US
dc.identifier.uri http://hdl.handle.net/2014/35158
dc.description.abstract This paper describes how a micromachined, electrostatically controlled, and capacitively sensed deformable membrane mirror would meet the needs for active and adaptive optical elements. en_US
dc.format.extent 383326 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other micromachined deformable mirror adaptive optics en_US
dc.title Fabrication and Characterization of a Micromachined Deformable Mirror for Adaptive Optics Applications en_US


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