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A Miniature High-Sensitivity Braodband Accelerometer Based on Electron Tunneling Transducers

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dc.contributor.author Rockstad, H. en_US
dc.contributor.author Kenny, T. en_US
dc.contributor.author Reynolds, J. en_US
dc.contributor.author Kaiser, W. en_US
dc.contributor.author Gabrielson, T. en_US
dc.date.accessioned 2004-10-06T01:54:19Z
dc.date.available 2004-10-06T01:54:19Z
dc.date.issued 1993-06-07 en_US
dc.identifier.citation Yokohama, Japan en_US
dc.identifier.clearanceno 93-0614 en_US
dc.identifier.uri http://hdl.handle.net/2014/35071
dc.description.abstract This paper describes the successful fabrication and demonstration of a new dual-element micromachined silicon tunnel accelerometer that extends the operational bandwidth beyond the resonant frequency of the proof mass. en_US
dc.format.extent 305898 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other microsensors miniature accelerometers en_US
dc.title A Miniature High-Sensitivity Braodband Accelerometer Based on Electron Tunneling Transducers en_US


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