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A Miniature High-Sensitivity Braodband Accelerometer Based on Electron Tunneling Transducers
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A Miniature High-Sensitivity Braodband Accelerometer Based on Electron Tunneling Transducers
Rockstad, H.
;
Kenny, T.
;
Reynolds, J.
;
Kaiser, W.
;
Gabrielson, T.
URI:
http://hdl.handle.net/2014/35071
Date:
1993-06-07
Citation:
Yokohama, Japan
Abstract:
This paper describes the successful fabrication and demonstration of a new dual-element micromachined silicon tunnel accelerometer that extends the operational bandwidth beyond the resonant frequency of the proof mass.
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JPL TRS 1992+
JPL TRS 1992+
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