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Interferometric Optical Filters Utilizing Metal Patterns on Free-Standing Thin Substrates

Interferometric Optical Filters Utilizing Metal Patterns on Free-Standing Thin Substrates

Ksendzov, A.; Fathauer, R.; Maker, P.; Muller, R.; Pike, W.; George, T.
URI: http://hdl.handle.net/2014/33775
Date: 1994-07-24
Citation: SPIE, Advanced Microdevices
San Diego, California

Abstract:

A new technology for infrared optical filters is presented. We have produced a bandpass filter consisting of a thin Si wafer with cross-shaped metal patterns deposited on both sides.

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