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Micromachined Silicon-Based Analytical Microinstruments for Space Science and Planetary Exploration

Micromachined Silicon-Based Analytical Microinstruments for Space Science and Planetary Exploration

Grunthaner, F. J.; Stalder, R. E.; Boumsellek, S.; VanZandt, T. R.; Kenny, T. W.; Hecht, M. H.; Ksendzov, A.; Homer, M. L.; Terhune, R. W.; Lane, A. L.; Butler, M. A.; Ricco, A. J.
URI: http://hdl.handle.net/2014/33215
Date: 1994--Augu
Citation: Yokohama, Kanagawa, Japan

Abstract:

For future planetary science missions, we are devloping a series of microinstruments using the techniques of silicon-based micromachining.

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