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Wide-Bandwidth Electro-Mechanical Actuators for Tunneling Displacement Transducers
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Wide-Bandwidth Electro-Mechanical Actuators for Tunneling Displacement Transducers
Kenny, T.
;
Kaiser, W.
;
Rockstad, H.
;
Reynolds, J.
;
Podosek, J.
;
Vote, E.
URI:
http://hdl.handle.net/2014/33115
Date:
1994
Citation:
Journal of Microelectromechanical Systems
Abstract:
A series of displacement transducers have been demonstrated which are based on the detection of electrons that quantum-mechanically tunnel across a narrow gap between electrodes.
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JPL TRS 1992+
JPL TRS 1992+
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