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Wide-Bandwidth Electro-Mechanical Actuators for Tunneling Displacement Transducers

Wide-Bandwidth Electro-Mechanical Actuators for Tunneling Displacement Transducers

Kenny, T.; Kaiser, W.; Rockstad, H.; Reynolds, J.; Podosek, J.; Vote, E.
URI: http://hdl.handle.net/2014/33115
Date: 1994
Citation: Journal of Microelectromechanical Systems

Abstract:

A series of displacement transducers have been demonstrated which are based on the detection of electrons that quantum-mechanically tunnel across a narrow gap between electrodes.

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