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(abstract) Optical Scattering and Surface Microroughness of Ion Beam Deposited Au and Pt Thin Films

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dc.contributor.author Al-Jumaily, Ghanim A. en_US
dc.contributor.author Raouf, Nasrat A. en_US
dc.contributor.author Edlou, Samad M. en_US
dc.contributor.author Simons, John C. en_US
dc.date.accessioned 2004-10-05T05:10:36Z
dc.date.available 2004-10-05T05:10:36Z
dc.date.issued 1994-07-25 en_US
dc.identifier.citation San Diego, CA en_US
dc.identifier.clearanceno 94-1040 en_US
dc.identifier.uri http://hdl.handle.net/2014/33106
dc.description.abstract Thin films of gold and platinum have been deposited onto superpolished fused silica substrates using thermal evaporation, ion assisted deposition (IAD), and ion assisted sputtering. The influence of ion beam flux, thin film material, and deposition rate on the films microroughness have been investigated. Short range surface microroughness of the films has been examined using scanning tunneling microscopy (STM) and atomic force microscopy (AFM). Long range surface microroughness has been characterized using an angle resolved optical scatterometer. Results indicate that ion beam deposited coatings have improved microstructure over thermally evaporated films. en_US
dc.format.extent 18583 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other gold platinum thin films thermal evaporation ion assisted deposition ion assisted sputtering fused silica ion beam microroughness surfaces en_US
dc.title (abstract) Optical Scattering and Surface Microroughness of Ion Beam Deposited Au and Pt Thin Films en_US


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