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Modulation Collimator Fine Grids for HESP

Show simple item record Hecht, M. en_US Ling, J. en_US Siegel, P. en_US Kenny, T. en_US Grunthaner, F. en_US 2004-10-04T22:56:08Z 2004-10-04T22:56:08Z 1993--April en_US
dc.identifier.citation Pasadena, California, USA en_US
dc.identifier.clearanceno 94-0295 en_US
dc.description.abstract The proposed High Engergy-Solar Physics (HESP) million will require fine, precise, high aspect ratio modulation collimators for the High Energy Imagin Spectrometer (HEISPEC). The fabrication approach described here rests on the proven precision of semiconductor lithography - the ability to replicate extremely accurate patterns onto different planar substrateds. en_US
dc.format.extent 273321 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other LIGA HESP pitch structures solar x-rays gamma rays acrylic en_US
dc.title Modulation Collimator Fine Grids for HESP en_US

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