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LIGA and Thick Film Lithography for Thick Structures

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dc.contributor.author Brennen, Reid A. en_US
dc.contributor.author Hecht, Michael H. en_US
dc.contributor.author Wiberg, Dean V. en_US
dc.contributor.author Manion, Steve J. en_US
dc.contributor.author Bonivert, William D. en_US
dc.contributor.author Hruby, Jill M. en_US
dc.date.accessioned 2004-10-04T19:55:16Z
dc.date.available 2004-10-04T19:55:16Z
dc.date.issued 1995-09-27 en_US
dc.identifier.citation MEMS Workshop, AVS en_US
dc.identifier.citation Anaheim, California, U.S.A. en_US
dc.identifier.clearanceno 95-1372 en_US
dc.identifier.uri http://hdl.handle.net/2014/31929
dc.format.extent 522833 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other LIGA Lithographie Galvanoformung and Abformung en_US
dc.subject.other Thick Film Lithography en_US
dc.title LIGA and Thick Film Lithography for Thick Structures en_US


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