LIGA and Thick Film Lithography for Thick Structures

Brennen, Reid A.; Hecht, Michael H.; Wiberg, Dean V.; Manion, Steve J.; Bonivert, William D.; Hruby, Jill M.

dc.contributor.author	Brennen, Reid A.	en_US
dc.contributor.author	Hecht, Michael H.	en_US
dc.contributor.author	Wiberg, Dean V.	en_US
dc.contributor.author	Manion, Steve J.	en_US
dc.contributor.author	Bonivert, William D.	en_US
dc.contributor.author	Hruby, Jill M.	en_US
dc.date.accessioned	2004-10-04T19:55:16Z
dc.date.available	2004-10-04T19:55:16Z
dc.date.issued	1995-09-27	en_US
dc.identifier.citation	MEMS Workshop, AVS	en_US
dc.identifier.citation	Anaheim, California, U.S.A.	en_US
dc.identifier.clearanceno	95-1372	en_US
dc.identifier.uri	http://hdl.handle.net/2014/31929
dc.format.extent	522833 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	LIGA Lithographie Galvanoformung and Abformung	en_US
dc.subject.other	Thick Film Lithography	en_US
dc.title	LIGA and Thick Film Lithography for Thick Structures	en_US