Gas Sensor Test Chip

Buehler, M.; Ryan, M.

dc.contributor.author	Buehler, M.	en_US
dc.contributor.author	Ryan, M.	en_US
dc.date.accessioned	2004-10-04T19:54:40Z
dc.date.available	2004-10-04T19:54:40Z
dc.date.issued	1995
dc.identifier.citation	IEEE Conf. On Microelectronic Test Structures	en_US
dc.identifier.citation	Trento, Italy	en_US
dc.identifier.clearanceno	95-1366
dc.identifier.uri	http://hdl.handle.net/2014/31926
dc.description.abstract	A new test chip is being developed to characterize conducting polymers used in gas sensors. The chip, a seven-layer cofired alumina substrate with gold electrodes, contains 11 comb and U- bend test structures. These structures are designed to measure the sheet resistance, conduction anisotropy, and peripheral conduction of spin-coated films that are not subsequently patterned.	en_US
dc.format.extent	83451 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	conducting polymers gas sensors test chipnd peripheral conduction spin-coated films	en_US
dc.title	Gas Sensor Test Chip	en_US