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dc.contributor.author Buehler, M. en_US
dc.contributor.author Ryan, M. en_US
dc.date.accessioned 2004-10-04T19:54:40Z
dc.date.available 2004-10-04T19:54:40Z
dc.date.issued 1995
dc.identifier.citation IEEE Conf. On Microelectronic Test Structures en_US
dc.identifier.citation Trento, Italy en_US
dc.identifier.clearanceno 95-1366
dc.identifier.uri http://hdl.handle.net/2014/31926
dc.description.abstract A new test chip is being developed to characterize conducting polymers used in gas sensors. The chip, a seven-layer cofired alumina substrate with gold electrodes, contains 11 comb and U- bend test structures. These structures are designed to measure the sheet resistance, conduction anisotropy, and peripheral conduction of spin-coated films that are not subsequently patterned. en_US
dc.format.extent 83451 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other conducting polymers gas sensors test chipnd peripheral conduction spin-coated films en_US
dc.title Gas Sensor Test Chip en_US


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