Show simple item record Buehler, M. en_US Ryan, M. en_US 2004-10-04T19:54:40Z 2004-10-04T19:54:40Z 1995
dc.identifier.citation IEEE Conf. On Microelectronic Test Structures en_US
dc.identifier.citation Trento, Italy en_US
dc.identifier.clearanceno 95-1366
dc.description.abstract A new test chip is being developed to characterize conducting polymers used in gas sensors. The chip, a seven-layer cofired alumina substrate with gold electrodes, contains 11 comb and U- bend test structures. These structures are designed to measure the sheet resistance, conduction anisotropy, and peripheral conduction of spin-coated films that are not subsequently patterned. en_US
dc.format.extent 83451 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other conducting polymers gas sensors test chipnd peripheral conduction spin-coated films en_US
dc.title Gas Sensor Test Chip en_US

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