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Multi-Wafer Bulk Micromachines Nano-g Accelerometer

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dc.contributor.author Hartley, Frank en_US
dc.date.accessioned 2004-10-03T06:07:46Z
dc.date.available 2004-10-03T06:07:46Z
dc.date.issued 1995-09 en_US
dc.identifier.citation American Vacuum Society en_US
dc.identifier.citation Anaheim Marriott en_US
dc.identifier.clearanceno 95-1251 en_US
dc.identifier.uri http://hdl.handle.net/2014/31652
dc.format.extent 46940 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Multi-Wafer Micromachines en_US
dc.title Multi-Wafer Bulk Micromachines Nano-g Accelerometer en_US


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